JPH0429988B2 - - Google Patents

Info

Publication number
JPH0429988B2
JPH0429988B2 JP57113201A JP11320182A JPH0429988B2 JP H0429988 B2 JPH0429988 B2 JP H0429988B2 JP 57113201 A JP57113201 A JP 57113201A JP 11320182 A JP11320182 A JP 11320182A JP H0429988 B2 JPH0429988 B2 JP H0429988B2
Authority
JP
Japan
Prior art keywords
test
storage
tested
yield
semiconductor integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57113201A
Other languages
English (en)
Japanese (ja)
Other versions
JPS593371A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP57113201A priority Critical patent/JPS593371A/ja
Publication of JPS593371A publication Critical patent/JPS593371A/ja
Publication of JPH0429988B2 publication Critical patent/JPH0429988B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP57113201A 1982-06-30 1982-06-30 半導体装置の試験装置 Granted JPS593371A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57113201A JPS593371A (ja) 1982-06-30 1982-06-30 半導体装置の試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57113201A JPS593371A (ja) 1982-06-30 1982-06-30 半導体装置の試験装置

Publications (2)

Publication Number Publication Date
JPS593371A JPS593371A (ja) 1984-01-10
JPH0429988B2 true JPH0429988B2 (en]) 1992-05-20

Family

ID=14606111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57113201A Granted JPS593371A (ja) 1982-06-30 1982-06-30 半導体装置の試験装置

Country Status (1)

Country Link
JP (1) JPS593371A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000515662A (ja) * 1996-08-07 2000-11-21 マイクロン、テクノロジー、インコーポレーテッド 欠陥を有する集積回路のテスト時間と修復時間とを最適化するためのシステム

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59228729A (ja) * 1983-06-09 1984-12-22 Toshiba Corp 半導体測定装置
JPH01197674A (ja) * 1988-02-03 1989-08-09 Mitsubishi Electric Corp 物品検査方法
JPH0252446A (ja) * 1988-08-17 1990-02-22 Nec Kyushu Ltd 集積回路の試験装置
JP2806748B2 (ja) * 1993-07-22 1998-09-30 日本電気株式会社 ウエハの検査方法
JPH10214870A (ja) * 1997-01-29 1998-08-11 Hitachi Ltd 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000515662A (ja) * 1996-08-07 2000-11-21 マイクロン、テクノロジー、インコーポレーテッド 欠陥を有する集積回路のテスト時間と修復時間とを最適化するためのシステム

Also Published As

Publication number Publication date
JPS593371A (ja) 1984-01-10

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